Introduction of an Adaptive Modeling Technique for the Simulation of RF Structures Requiring the Coupling of Maxwell’s, Mechanical, and Solid-State Equations
نویسندگان
چکیده
As RF technologies mature designing complex RF systems is becoming an increasingly difficult task. Modern systems include components that cannot be modeled with traditional simulators. This paper introduces a modeling technique for use in RF systems that combines Maxwell’s, mechanical, and solid-state equations. The resulting simulator can be used to simulate microelectromechanical structures (MEMS) and semiconductor devices. The motion coupling technique is applied to a MEMS parallel plate capacitor for demonstration purposes.
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